Richard, I believe EUV lithography of ASML is using ALD ( atomic layer disposition). All large foundries TSMC, Intel and Samsung are using this process and are using this very expensive ASML equipment.
Great post Jimmy. I found this great explanation on EUV and it blows my mind. If this ALD patent can somehow make perfect polymer added wafers, we are truly in for a ride. I'm thankful many Dutch photonics experts like LWLG tech very much.