Thanks Jeunke! I’m curious if ALD can also be accomplished separate from EUV. ALD sounds like a process step that can be applied to other technologies not related to EUV as well. If so, I wonder if any smaller foundries without EUV equipment are capable of ALD. If they are not, we know this patent is intended to target the very large Intel, GF, HG Tech, etc. type foundries.
Either way, we will know in a very short amount of time which foundries we are working with. I am excited for the decade long speculation to end with the next major announcement.
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