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borusa

07/12/21 7:18 PM

#151263 RE: alan81 #151262

Yes, EUV is a must. When the processes get down below 3nm even the EUV will need multiple passes, according to Jim K.

Thanks for taking time, rzb
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borusa

07/13/21 1:46 PM

#151265 RE: alan81 #151262

Google Bergamo