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borusa

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borusa

Re: alan81 post# 151262

Monday, 07/12/2021 7:18:39 PM

Monday, July 12, 2021 7:18:39 PM

Post# of 151672
Yes, EUV is a must. When the processes get down below 3nm even the EUV will need multiple passes, according to Jim K.

Thanks for taking time, rzb
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