Direct evidence connection between GlobalFoundries, (Intel)Ayar Labs, LWLG EO polymers. Note that LWLG is not referenced, however Carsten Eschenbaum, CTO of SilOriX, and Christian Koos are listed authors on the paper. We all know the connection to LWLG and SilOriX and Christian Koos.
White Paper - Hybrid Integration of Exotic Materials in CMOS Platform
Deniz Onural is at Boston University in their Silicon Photonics Lab. Hayk Gevorgyan is a Senior Photonics Device Engineer at Ayar Labs. Milos Popovic is also at Boston University and a co-founder at Ayar Labs.
This paper describes the BEOL process for integrating EO polymers in ring modulators on wafers supplied by GlobalFoundries.
Title: “Towards Hybrid Integration of Exotic Materials in an Electronic-Photonic CMOS Platform via Substrate Removal”
Abstract: “We demonstrate direct access to the silicon device layer of a monolithic CMOS electronics-photonics platform with a full-digital back-end-metal stack, in post-fabrication at die level, allowing the integration of functional materials (e.g. into slot waveguides).”
Paper requires payment to view. For those extra curious who want to read the details, go ahead and support Optica by purchasing the white paper.
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