BAG, in my last post, I commented on NVEC, FLML, TINY and MFIC.OB.
I have known TGAL and JMAR for quite sometime, and I am not sure why you included them on the list, they do provide equipment (etching systems and lithography tools in the case of JMAR) for the manufacturing of MEMS etc., but their mainstay is still supplying the semi arena. I think that CYMI is a much better play in the lithography arena (if you are going to participate in the MEMS part of the NANO universe). SOTK, like MFIC is not really a NANO company, but a provider of coating and spraying systems.
Companies that actually make nano materials are the like of CCMP, Degussa in Germany and CBT (I play only CCMP, CBT is too boring..) and you may want to look at MVIS for actual MEMS devices outside the micropumps universe (I have played that one in the past and may get back to it...).
Another upcoming NANO participation will be ambient superconductivity (it must be by general physics principle a unidimensional system, like for instance carbon nanotubes). I don't know of any public company to use to participate in and my own activities are in a private company (not in carbon nanotubes, though). SEC forbids discussions of these activities in public domain, thus, that is as far as I can go on this forum.