Not sure re: KLA's steppers, but this may be an interesting event to hear from(from KLA's site):
"7th Annual Lithography Users Forum
Date: Sunday, February 19, 2006
Location: Crowne Plaza
Park Center Plaza Ballroom
282 Almaden Blvd
San Jose, CA 95113
Agenda: 5:30 p.m. - 6:30 p.m. - Cocktail Reception
6:30 p.m. - 7:30 p.m. - "From Data to Decisions"
Chris Mack
"Enabling Design for Manufacturability: A Perspective for 45, 32 and 22nm Technologies"
Luigi Capodieci, Advanced Micro Devices"