Intel Corp (INTC)

[SemiconEng]

AMD Places Multi-Unit Copper Metrology Order

http://biz.yahoo.com/bw/050201/15199_1.html
AMD Places Multi-Unit Copper Metrology Order with Philips Advanced Metrology Systems

NATICK, Mass.--(BUSINESS WIRE)--Feb. 1, 2005--Royal Philips Electronics (NYSE: PHG - News) today announced that its metrology business unit, Philips Advanced Metrology Systems, Inc. (Philips AMS), has received a multi-unit order for its Series 3300 copper metrology tool from AMD Saxony LLC & Co. KG, Dresden (Germany), a subsidiary of Advanced Micro Devices, Inc. (AMD) in Sunnyvale, Calif. AMD will incorporate the Philips AMS equipment as a metal metrology tool for on-line production monitoring of the copper/low k process for both 200mm and 300mm fabs and has been running the Philips AMS Series 3300 at its Dresden fab for several months.


http://www.ams.philips.com/3300_press.html
Non-contact and non-destructive measurements of the thickness and uniformity of metal and dielectric features.




*** FYI, just for those that may not know, the term "Metrology" is used to describe Process Monitoring and/or tools associated with it. More commonly known as Measurement/Inspection. This tool apparently is used for Film Thickness and Uniformity measurements, and usually, the goal of Metrology, is to improve Yields and/or Bin Splits Hummmmmm..... WAG: Do you "suppose" that AMD is having difficulties with thier..... Ummmmmm..... I mean IBM's, 90nm Process's Yields/Binsplits? Maybe it's not the Measurement Tools, maybe it's just a crappy process.