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Fruno

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Fruno

Re: forztnt2 post# 123877

Wednesday, 11/30/2022 10:47:34 AM

Wednesday, November 30, 2022 10:47:34 AM

Post# of 195438
forztnt2 - thanks for connecting these dots. LWLG patent 11,262,605 B2 (ACTIVE REGION-LESS POLYMER MODULATOR INTEGRATED ON A COMMON PIC PLATFORM AND METHOD) states the Tg of the EO polymer as 150 - 200 degrees C. ALD processes can vary from 20 - 800 degrees C.

https://en.wikipedia.org/wiki/Atomic_layer_deposition
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