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Monday, October 03, 2022 1:43:28 PM
https://patents.justia.com/patent/10862114
Of one advantage, among others, the system and manufacturing method of the present application achieves utilization or conversion of the Si source material (e.g. Silane) to Si nanowires approaching 100%. In some embodiments, utilization of the Si source material is in the range of about 30-100%, or in the range of 30-99.5%, and more usually in the range of about 70-99.5%. In one exemplary embodiment, Si nanowires are grown in the system described herein using the following conditions: temperature of about 300-900° C., silane concentration of about 5-100% in the process gas mixture of: SiH4 of about 5-100 wt. %, He (or Ar or N2) of about 0-50 wt. %, and H2 of about 0-50 wt. %, at a growth time in the range of about 10-500 minutes. The aforementioned conditions and tumbler rotation are preferably controlled by computer with automatic software for the production.
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