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Thursday, September 29, 2022 1:01:10 PM
https://patents.justia.com/patent/20220115650 publication date April 2022
Just above the Experimental heading you will find this statement
Any appropriate silicon source may be used for the non-conformal and conformal silicon layers, including silane (SiH4), dichlorosilane (H2SiCl2), monochlorosilane (H3SiCl), trichlorosilane (HSiCl3), and silicon tetrachloride (SiCl4) to form the silicon layers. Depending on the gas used, the amorphous silicon layer may be formed by decomposition or a reaction with another compound, such as by hydrogen reduction. According to various embodiments, the same or a different silicon source may be used for the each of the layers.
Also : https://patents.justia.com/patent/11289701 another patent from Amprious , This one says date of patent March 2022
All Amprious patents https://patents.justia.com/assignee/amprius-inc
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