Zinc I don't know how new GaAs Wafers are..... I worked at Raytheon in the late 90's producing GaAs wafers and operated a AEBLE E-Beam system in a GaAs wafer fab and also performed E-Beam Photo Lithography. I also operated a CD-Sem and IVS equipment for wafer qualification. So they have been doing this since at least 1998. I do not believe this was something new to them and had been doing it for some time. I do remember that they received the AEBLE E-Beam in 1983. I tried finding when GaAs wafers began being used and i can't find any dates. Just my 2 cents in case you were lead to believe that this is some new technology.