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alan81

12/02/02 12:07 AM

#2919 RE: Elmer Phud #2897

Short loops vs. full loops

A full loop is a wafer processed from beginning to end using then normal process flow. A short loop is a wafer that is run through only some of the process steps. It allows much quicker feedback on process changes. For instance, they can run a wafer and only do the metal patterns. They would then measure opens and shorts to see if whatever process change they are evaluating improves, or degrades the metal defect density.
--Alan