Intel Corp (INTC)

[SemiconEng]

Photoresists Meet the 193 nm Milestone

http://tinyurl.com/3zmq8
For many companies, 2005 will be the year that 90 nm processes are ramped into full-scale production and 193 nm systems become the lithography platform of choice for critical levels (Fig. 1 ). Alongside this significant milestone, immersion lithography is grabbing all the headlines. "Immersion lithography has stolen the spotlight this year, but from a production standpoint, we can say that this is the year that 193 nm lithography moved from development into large-scale production," said Mark Slezak, technical manager of lithography for JSR Micro (Sunnyvale, Calif.).