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SemiconEng

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SemiconEng

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Saturday, 10/12/2002 7:20:45 AM

Saturday, October 12, 2002 7:20:45 AM

Post# of 151812
Nikon Files Additional Litho Stepper Lawsuit Against ASML

http://www.siliconstrategies.com/story/OEG20021011S0025
TOKYO -- Increasing its legal assault against its rival, wafer stepper maker Nikon Corp. filed patent-infringement complaints against ASML Holding BV (Veldhoven, Netherlands) in Japan and North Korea this week, following moves initiated last year in U.S. courts and with the U.S. International Trade Commission.

I wonder if this is going to hurt 193nm Stepper Deliveries, and thus 0.09u Development/Implementation???

Semi



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