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Monday, 08/02/2004 12:34:30 PM

Monday, August 02, 2004 12:34:30 PM

Post# of 151741
Intel unveils EUV micro-exposure tool

http://tinyurl.com/6crfk
HILLSBORO, Ore. — Intel Corp. said Monday (Aug. 2) it has installed an extreme ultraviolet (EUV) micro-exposure tool from Exitech Ltd. at its development fab here.

Using the 13.5-nm EUV light, the tool is capable of exposing 30-nm isolated lines, and Intel will use it to prove out the EUV photoresists and masks.

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