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Re: dougSF30 post# 16966

Friday, 11/07/2003 11:36:53 PM

Friday, November 07, 2003 11:36:53 PM

Post# of 97585
I feel strange siding with Elmer, but as I understand it, defect density shouldn't be different between SOI and bulk. It has to do with foreign matter (dust) not the kind of wafer--same fab, same air, same defect density. If there are problems peculiar to SOI, they would not be defect density.

Unless there are using bad wafers...

EDIT: Well, process size should matter, but they are both at 13nm here too.

blauboad

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