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MVSystems,Inc. www.mvsystems.info

News July 5th, 2005

MVS receives an order for its patented reel to reel cluster tool system for thin film Silicon deposition to be used for flexible solar cells and displays.

Golden, Colorado, USA: MVSystems, Inc. is pleased to announce that it has received an order from The University of Waterloo, Canada for MVS’s patented reel to reel cluster tool system to be used for flexible thin film Silicon solar cell and display development. Over the last 3 years MVS has supplied to the University of Waterloo, several cluster tool systems for thin film transistor development. The group is headed by Professor Arokia Nathan, a world renowned expert in thin film electronic device development.

MVS’s patented (US patent number:6,258,408 B1) reel to reel cluster tool involves the use of a cassette, which houses a flexible material. Each process chamber contains appropriate drives and mechanisms to locate the cassette over a deposition zone (e.g. PECVD or sputtering). Within the process chamber, the cassette is engaged for movement of the flexible material from one reel to another during the deposition process. At the end of deposition, the flexible material is returned to its original reel and locked into position and disengaged from the chamber for transport; the entire cassette is then transported to the next chamber in a similar fashion to that for a rigid substrate (i.e. using a robotic arm). Hence cross contamination is eliminated for fabrication of advanced devices (solar cells or thin film transistors) on flexible substrates. The system also allows the use of cassettes and planar substrates.

MVS has recently installed a cluster tool system at Tokyo Institute of Technology, Japan, completed phase 1 of the cluster tool for The National Renewable Energy Laboratory, Golden, Colorado, shipped a Multi- chamber PECVD system and a sputtering system to CIEMAT, Madrid, Spain and shipped an enhancement (involving robotic arm etc.) for the previously supplied cluster tool to IPE, University of Stuttgart, Germany. These systems are all used for advanced thin film silicon development.

MVS has also been conducting R & D for solar cells for XSunX (information can be found at http://biz.yahoo.com/bw/041018/185337_1.html and at http://www.XsunX.com), thin film transistors (TFT’s), imaging devices and memory devices for several companies.

MVS has also received from the Hawaii Natural Energy Institute two contracts, one for the development of four terminal solar cell devices using thin film Silicon and CIS and photo-electrochemical devices for conversion of solar energy to hydrogen.

MVS manufactures advanced Cluster Tool systems which allow integration of different process modules such as PECVD, sputtering, Hot Wire CVD, rapid anneal etc. The process modules are stationed around a central evacuated isolation and transfer zone (ITZ): a computerized robotic arm, situated within the ITZ, inserts and extracts the substrates from the process chambers. This versatile configuration permits the deposition of multi-layers in any sequence, thus allowing the fabrication of advanced electronic device structures, such as solar cells, thin film transistors, sensor arrays, etc.

MVSystems, Inc., a US based company, was founded by the leading authorities in the thin film semiconductor area. They have pioneered the expanding and versatile Amorphous Silicon technology from 1970 onwards. The principals involved have a long history of PECVD equipment development for research and production. MVS has delivered in excess of 70 systems and are located in 18 countries.

Administration 327 Lamb Lane • Golden, Colorado 80401 • USA
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Manufacturing 500 Corporate Circle, Suite L, • Golden, Colorado 80401•USA
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Incorporated in 1989