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Monday, 10/06/2008 10:15:04 PM

Monday, October 06, 2008 10:15:04 PM

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NEWS 10/6:

Cimetrix to Present with Axcelis Technologies

Attendees can explore Data-Driven Tool Architectures at AEC/APC 2008

SALT LAKE CITY, Oct 06, 2008 /PRNewswire-FirstCall via COMTEX/ -- Cimetrix, Incorporated (OTC Bulletin Board: CMXX), a leading provider of factory automation and tool control software and solutions for the global semiconductor and electronics industries, will present with Axcelis Technologies, at the annual AEC/APC Symposium in October. The presentation will focus on Data-Driven Tool Architectures and the results of a Joint Development Project between the two companies completed this year. Throughout the presentation, the companies will discuss the industry's increasing demand for higher quality and quantity of data to achieve optimal equipment productivity and the benefits of a data-driven architecture.
In late 2006, the two companies began work on a joint development project to create an equipment control software solution based on a data-driven architecture. Motivated by their shared vision of improved quality and quantity of data, Axcelis and Cimetrix developed Cimetrix's CIMControlFramework(TM) for a new Axcelis multi-chamber wafer cleaning system, the Integra RS(TM). The goal of the project was to deliver optimum data collection, storage, management, and analysis to benefit both the equipment supplier and end user. Use cases and data analysis examples will be included in the presentation.

This year, the Symposium will be held on October 4 through 8 in Salt Lake City, Utah at the Cliff Lodge at Snowbird. The Data-Driven Tool Architectures presentation is one of the Technical Sessions offered on Tuesday, October 7 at 3:30 p.m. The authors are Glen Gilchrist, Senior Systems Engineer, Axcelis Technologies; Larry Bourget, Director of Product Management, Axcelis Technologies; and Kourosh Vahdani, VP of Global Services, Cimetrix, Inc.

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